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Title: The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films
Contributor:
Marian MARTON, Łukasz KACZMAREK, Mariana KUFFOVA
Abstract:
In this study a-C:H (hydrogenated amorphous carbon) thin films were deposited on the 7075 Al alloy without an interlayer using a DC CVD (direct current chemical vapor deposition) method with varied negative substrate bias in order to improve the hardness and Young´s modulus. The highest values of films hardness and Young´s modulus were 25.6±3.5 GPa and 140.3±4.6 GPa, respectively. The measured results show a promising potential of the a-C:H coated 7075 Al alloy for low load (up to 10 N) applications.
Place of publishing:
Warszawa
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Identifier:
oai:ribes-88.man.poznan.pl:2490
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Keywords:
mechanics, a-C:H thin film, hardness, Young´s modulus, 7075 Al alloy
Object collections:
Last modified:
Sep 16, 2025
In our library since:
Sep 16, 2025
Number of object content hits:
0
All available object's versions:
https://ribes-88.man.poznan.pl/publication/2798
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| Edition name | Date |
|---|---|
| The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films | Sep 16, 2025 |
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